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陶瓷薄膜

用特殊工艺技术,将陶瓷材料制成厚度在几微米以下而仍能保持陶瓷优越性能的一类陶瓷材料。所制成的薄膜器件用于集成电路半导体电路技术中。

ceramic film

用特殊工艺技术,将陶瓷材料制成厚度在几微米以下而仍能保持陶瓷优越性能的一类陶瓷材料。

陶瓷薄膜制备方法可分为两大类:(1)物理方法,包括真空热蒸发、直流和射频溅射(包括离子束溅射),激光蒸发以及分子束外延技术;(2)化学方法,包括喷雾热解、化学气相沉积(CVD)、溶胶-凝胶(Sol-Gel)及金属有机气相沉积(MOCVD)法等。每种方法均要求在基片上提供合适的原子流以便使需要的成分的薄膜在基片表面上可控生长。各种制备方法均各有其长处和短处,但可以根据不同的材料对象和应用目标选择适宜的工艺技术。

常见的陶瓷薄膜有高介电常数钛酸钡薄膜、钛酸铅薄膜。可用于制造大容量的薄膜电容器。掺的锶钡钛酸盐薄膜,可制成热敏电阻辐射热测量器。铌酸锶钡薄膜,可制成热释电探测器;钛酸铋薄膜,可制成铁电显示器。钇钡铜氧薄膜,可制成超导体用。氧化铝薄膜、氧化锆薄膜、氧化钛薄膜,可作为固-液分离膜使用。

Ceramic is a type of material deposited onto film substrate. There are many combinations of ceramics, a few have "spectral selective properties" (ie Titainium Nitride) which is different from being "spectrally select." The term spectrally select when used in the window film industry is referring to films that single out specific regions of the solar spectrum.

There are a number of window films that incorporate ceramic materials. Some are dye free/metal free, others contain dyes and pigments. Typically, you will see low reflectivity and low SHGC's on ceramics. The draw is the high performance and low reflectivity and most important the stability. Certain ceramics are incredibly stable compared to other metals, dyes, and alloys. Alloys can corrode, true ceramic materials are atomically stable and inert so they will not go through another chemical reaction which is what corrosion is.

Ceramic materials used in window films may be ultrafine “nano-particle dispersions” or other depositions of (for example) titanium nitride, antimony tin oxide,or indium tin oxide, to name a few. A ceramic can be electrically non-conductive, semi-conductive, super-conductive, or just plain “conductive.” Another term few people are familiar with is “cermet,” a term referring to composite

materials made from both ceramic and metallic ingredients, some of which are, in fact, used in window films.

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